Semiconductor device and manufacturing method for the same

ABSTRACT

A semiconductor device includes a first diffusion region including germanium atoms and first impurity atoms, provided on a surface layer of a semiconductor substrate, the first impurity atoms contributing to electric conductivity, and a second diffusion region including second impurity atoms, provided shallower than the first diffusion region from a surface of the first diffusion region, the second impurity atoms not contributing to the electric conductivity.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a divisional of U.S. application Ser. No.11/079,520, filed Mar. 15, 2005, the entire contents of which isincorporated herein by reference.

This application is based upon and claims the benefit of priority fromprior Japanese Patent Application P2004-245293 filed on Aug. 25, 2004;the entire contents of which are incorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and amanufacturing method for the semiconductor device, and particularly,relates to a semiconductor device having an active region provided byion implantation and a manufacturing method for the semiconductordevice.

2. Description of the Related Art

Control of the impurity distribution in a semiconductor layer isextremely important. For example, in a minute metal-oxide-semiconductor(MOS) transistor fabricated on a silicon (Si) semiconductor substrate,an impurity diffusion layer is required to be formed to have a shallowand abrupt impurity profile to achieve a high drive current, and tosuppress a short channel effect.

For example, in source/drain extension regions of a MOS transistor, ashallow pn junction must be formed with a thickness of or less thantwenty nm from a surface of a semiconductor substrate. In order to forma shallow pn junction, a shallow impurity doped region is required. Inthe formation of a shallow impurity doped region, ions of an impurityare implanted into a semiconductor substrate at low acceleration energyand a low dose. The impurities implanted into the semiconductorsubstrate are activated by annealing so as to form a shallow impuritydiffusion region.

For example, the diffusion coefficients of p-type impurities such asboron (B), and n-type impurities such as phosphorus (P) or arsenic (As)in the crystal of the Si semiconductor substrate are large. Impuritiesdiffuse out to both the interior and exterior of a semiconductorsubstrate due to the high temperature of activation annealing, such asrapid thermal annealing (RTA). Therefore, it is difficult to form ashallow impurity diffusion region with a high concentration ofimpurities in a semiconductor substrate. On the other hand, ifactivation annealing temperature is decreased in order to suppressdiffusion of impurities, a high concentration of impurities may not beactivated.

A method for co-implanting ions of nitrogen (N) or molecular nitrogen(N₂), and B ions has been suggested as a way of suppressing thediffusion of impurities (refer to Japanese Patent Gazette No. 3442154).However, there is a concern that accelerated diffusion of B ions willoccur due to point defects generated by the implantation of the N⁺ andN₂ ⁺. Therefore, it is difficult to form a shallow impurity diffusionregion having low resistance and a high concentration of activatedimpurities.

SUMMARY OF THE INVENTION

A first aspect of the present invention inheres in a semiconductordevice including a first diffusion region including germanium atoms andfirst impurity atoms, provided on a surface layer of a semiconductorsubstrate, the first impurity atoms contributing to electricconductivity; and a second diffusion region including second impurityatoms, provided at a depth more shallow than the first diffusion regionfrom a surface of the first diffusion region, the second impurity atomsnot contributing to the electric conductivity.

A second aspect of the present invention inheres in a method formanufacturing a semiconductor device including forming an amorphousregion in a surface region of a semiconductor substrate by implantingone of germanium ions and silicon ions; implanting ions of firstimpurity atoms into the amorphous region, the first impurity atomscontributing to electric conductivity; implanting ions of secondimpurity atoms into the amorphous region, the second impurity atoms notcontributing to the electric conductivity; and activating the ions ofthe first impurity atoms by annealing the surface region of thesemiconductor substrate.

A third aspect of the present invention inheres in a method formanufacturing a semiconductor device including forming a gate insulatingfilm on a surface of a semiconductor substrate and a gate electrode onthe gate insulating film; forming an amorphous region on both sides ofthe gate insulating film in a surface region of the semiconductorsubstrate by implanting one of germanium ions and silicon ions; forminga first impurity implanted region by implanting ions of first impurityatoms into the amorphous region, the first impurity atoms contributingto electric conductivity; implanting ions of second impurity atoms intothe amorphous region, the second impurity atoms not contributing to theelectric conductivity; and activating the ions of the first impurityatoms by annealing the surface region of the semiconductor substrate.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross sectional view showing an example of a semiconductordevice according to the embodiment of the present invention.

FIGS. 2 to 8 are cross sectional views showing an example of an impuritydoping method according to the embodiment of the present invention.

FIG. 9 is a diagram showing an example of B concentration distributionof an active region formed by B and F co-implantation, after activationannealing according to the embodiment of the present invention.

FIG. 10 is a diagram showing an example of sheet resistance of an activeregion formed by B and F co-implantation, after activation annealingaccording to the embodiment of the present invention.

FIG. 11 is a diagram showing examples of B concentration distributionsof active regions formed by B and F co-implantation, after activationannealing.

FIG. 12 is a diagram showing an example of F concentration distributionof an active region formed by B and F co-implantation, after activationannealing.

FIG. 13 is a diagram showing an example of F concentration distributionof an active region formed by B and F co-implantation.

FIG. 14 is a diagram showing an example of a dependence of sheetresistances of active regions formed by B and F co-implantation, afteractivation annealing, on acceleration energy of F ions.

FIG. 15 is a diagram showing an example of a dependence of Bconcentration distributions of active regions formed by B and Fco-implantation F, after activation annealing, on F/B dose ratio.

FIG. 16 is a diagram showing an example of a dependence of sheetresistances of active regions formed by B and F co-implantation, afteractivation annealing, on F/B dose ratio.

FIG. 17 is a diagram showing other example of a dependence of Bconcentration distributions of active regions formed by B and Fco-implantation, after activation annealing, on F/B dose ratio.

FIG. 18 is a diagram showing other example of a dependence of sheetresistances of active regions formed by B and F co-implantation, afteractivation annealing, on F/B dose ratio.

FIG. 19 is a diagram showing an example of B concentration distributionsof active regions formed without F⁺ implant, after activation annealing,using B and BF₂ as ion species.

FIG. 20 is a diagram showing an example of B concentration distributionsof active regions formed by B and F co-implantation at a F/B dose ratioof 1, after activation annealing, using B and BF₂ as ion species.

FIG. 21 is a diagram showing an example of B concentration distributionof an active region formed by B and F co-implantation at a F/B doseratio of 1.2, after activation annealing, using B and BF₂ as ionspecies.

FIG. 22 is a diagram showing an example of a dependence of sheetresistances of active regions after activation annealing, on a F/B doseratio, using B and BF₂ as ion species.

FIG. 23 is a diagram showing examples of B concentration distributionsof active regions formed by B and N co-implantation, after activationannealing.

FIG. 24 is a diagram showing a dependence of sheet resistances of activeregions formed by B and N co-implantation, on acceleration energy of Nions, after activation annealing.

FIG. 25 is a diagram showing an example of a dependence of Bconcentration distributions of active regions formed by B and Nco-implantation, after activation annealing, on a N/B dose ratio.

FIG. 26 is a diagram showing an example of a dependence of sheetresistances of active regions formed by B and N co-implantation, afteractivation annealing, on a N/B dose ratio.

FIG. 27 is a diagram showing other example of a dependence of Bconcentration distributions of active regions formed by B and Nco-implantation, after activation annealing, on a N/B dose ratio.

FIG. 28 is a diagram showing other example of a dependence of sheetresistances of active regions formed by B and N co-implantation, afteractivation annealing, on a N/B dose ratio.

FIG. 29 is a diagram showing examples of B concentration distributionsof active regions formed after activation annealing at a N/B dose ratioof 0.8, using B and BF₂ as ion species.

FIG. 30 is a diagram showing examples of B concentration distributionsof active regions formed after activation annealing at a N/B ratio of 1,using B and BF₂ as ion species.

FIG. 31 is a diagram showing an example of a dependence of sheetresistances of active regions formed after activation annealing using Band BF₂ as ion species, on N/B dose ratio.

FIGS. 32 to 41 are cross sectional views showing an example of amanufacturing method of a semiconductor device according to theembodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

Various embodiments of the present invention will be described withreference to the accompanying drawings. It is to be noted that the sameor similar reference numerals are applied to the same or similar partsand elements throughout the drawings, and the description of the same orsimilar parts and elements will be omitted or simplified.

A semiconductor device according to the embodiment of the presentinvention includes a first diffusion region 22 provided on a surfacelayer of a semiconductor substrate 10, and a second diffusion region 24provided at a more shallow depth than the first diffusion region 22 froma surface of the first diffusion region 22, as shown in FIG. 1. In orderto form a pn junction with the semiconductor substrate 10, the firstdiffusion region 22 includes first impurity atoms which contributes toelectric conductivity. According to the type of conductivity of thesemiconductor substrate 10, impurity atoms introduced at a donor levelformed with shallow level below the bottom of the conduction band or anacceptor level formed with shallow level above the top of the valenceband, in the bandgap of the band structure of a semiconductor crystal isused as the first impurity atoms. For example, a p-type impurity atomsuch as B, and an n-type impurity atom such as P are used for thesilicon crystal serving as a host semiconductor. Additionally, the firstdiffusion region 22 includes germanium (Ge). Ge may be distributed inthe semiconductor substrate 10 outside of the first diffusion region 22.Further, the second diffusion region 24 includes second impurity atomswhich do not contribute to electric conductivity. The second impurityatoms may be fluorine (F), N, and the like.

Depth of the first diffusion region 22 is 100 nm or less, desirably 50nmor less, and even more desirably 30 nm or less, for example. Depth ratioof the second diffusion region 24 to the first diffusion region 22 is0.1 or above and below 1, and desirably 0.25 or above and 0.5 or below.

Next, an impurity doping method for forming a pn junction with B and Fas the first and second impurities doped into the Si n-typesemiconductor substrate 10, will be described. A p-MOS transistor is thesemiconductor device of interest. Impurity doping and annealing onsource/drain extension regions of a p-MOS transistor will be the mainfocuses of the description. Description of manufacturing processes suchas photolithography, etching and the like, has been omitted.

As shown in FIG. 2, an oxide film 11 of silicon dioxide (SiO₂) is formedby thermal oxidation on a surface of then-type semiconductor substrate10 at a thickness of approximately one nm. As shown in FIG. 3, Gepre-amorphization implantation (PAI) is executed through the oxide film11. Ion implantation conditions are an acceleration energy of five keVand a dose of 1×10¹⁵ cm², for example. A projected range of Ge isapproximately eight nm. Here, the term of “projected range” is definedas a depth where the most implanted ions stop in the target material. Anamorphous region 16 is formed at an approximately sixteen nm depth fromthe interface of the oxide film 11 and the semiconductor substrate 10due to damage caused by the Ge PAI. In addition, in the embodiment Ge isused for PAI. However, it is also possible to implant Si ions for PAI.

As shown in FIG. 4, B⁺ is implanted into the amorphous region 16 throughthe oxide film 11, to form a first impurity implanted region 18. The ionimplantation conditions are an acceleration energy of 0.2 keV and a doseof 1×10¹⁵ cm⁻², for example. The projected range of the implanted B⁺ isat a depth of two nm from the surface of the amorphous region 16.

As shown in FIG. 5, F⁺ is co-implanted into the first impurity implantedregion 18 formed in the amorphous region 16 through the oxide film 11.Due to the co-implantation of F⁺, a second impurity implanted region 20is formed. The ion implantation conditions are an acceleration energy of2.5 keV and a dose of 1×10¹⁵ cm⁻², for example. The projected range ofthe implanted F³⁰ is at a depth of eight nm from the surface of theamorphous region 16.

As shown in FIG. 6, the implanted B⁺ in the first impurity implantedregion 18 are electrically activated by RTA while diffusing, to form ap-type B diffusion region 122. Simultaneously, a diffusion region 124including diffused F is formed deeper than the B diffusion region 122.The activation annealing by RTA is executed under conditions of atemperature of approximately 800° C. to 900° C. for five seconds. Theamorphous region 16 shown in FIG. 5 is re-crystallized by the activationannealing.

As shown in FIG. 7, an insulating film 26 of a material such as SiO₂,silicon nitride (Si₃N₄), or boron silicate glass (BSG), is deposited ontop of the oxide film 11 by chemical vapor deposition (CVD) . Thetemperature of the CVD is between 650° C. and 700° C. Subsequently,activation annealing at approximately 1000° C. to 1080° C. is executedby spike RTA. Here the term “spike RTA” refers to an RTA process thateliminates the time to maintain the highest attained temperature.Afterward, as shown in FIG. 8, the insulating film 26 and the oxide film11 are removed by wet etching. In this manner, the first diffusionregion 22 is formed as an active region of a semiconductor device. Thesecond diffusion region 24 containing both activated B and F is formedon an upper side of the first diffusion region 22.

Recently, a method of activation annealing for implanted impurities byan extremely short pulsed light using a flash lamp, laser and the like,is being suggested as a way to achieve a shallow pn junction. However,many aspects of annealing by an extremely short pulsed light remainunknown. Additionally, when B⁺ is co-implanted with substances such asF⁺ or N⁺, diffusion of B is suppressed to achieve an abrupt impuritydistribution. However, point defects such as interstitial Si atoms orvacancies in the Si crystal are generated by ion implantation of F or N.The point defects caused by ion implantation easily tend to form pairswith implanted B impurities. When B impurities are paired with the pointdefects, the pairs of B and point defect can move around in the siliconcrystal relatively easily. Thus, enhanced diffusion of B occurs.

In the embodiments, B and F are co-implanted within the amorphous region16 formed by Ge PAI. Since the amorphous region 16 does not possess acrystalline structure, the point defects caused by ion implantation maynot be generated. As a result, enhanced diffusion of B is suppressed,making it possible to achieve an abrupt impurity distribution and ashallow impurity diffusion region.

In the description put forth above, B⁺ is implanted into the amorphousregion 16 to form the first impurity implanted region 18 before F⁺implant. However, if B and F are co-implanted within the amorphousregion 16, B⁺ may be implanted after F⁺ implant that forms the secondimpurity implanted region 20.

As shown in FIG. 9, the concentration of B after spike RTA of an activeregion (first diffusion region) according to the embodiment isapproximately 1×10²⁰ cm⁻³ at the flat region located near ten nm fromthe surface. The diffusion depth of B is approximately 27 nm. Here, theconcentration distribution of B is measured by secondary ion massspectrometry (SIMS) . The diffusion depth of B corresponds to a positionwhere the concentration of B decreases to 1×10¹⁸ cm⁻³. The concentrationdistribution of B after spike RTA of an active region formed by B and Fco-implantation without Ge PAI is also shown in FIG. 9 as a comparativeexample. As compared with the concentration distribution of B inactiveregions according to the embodiment, the diffusion depth of B in activeregions in the comparative example is approximately 28.5 nm deeper. Thesheet resistance Rs of the active region according to the comparativeexample is approximately 13% increased compared to the active regionaccording to the embodiment. Sheet resistance Rs is inverselyproportional to activated B concentration and the depth of an activeregion. Therefore, it is determined that activated B concentrationincreases by Ge PAI and by B and F co-implantation. In this manner,according to the embodiment, it is possible to achieve an active regionwith low resistance.

Additionally, as shown in FIG. 11, when acceleration energy of F⁺co-implanted with B⁺ in the amorphous region formed by Ge PAI ischanged, concentration distribution of B of the active region afterspike RTA change. As an example, compared to the active region formedwithout F⁺ implant, an abrupt concentration distribution of B isachieved with the active regions co-implanted at F⁺ acceleration energyof 2.5 keV and below. The diffusion distances of B in the active regionsco-implanted at F⁺ acceleration energy of 5 keV and above increasecompared with the diffusion distance of B in the active region formedwithout F⁺ implant. Co-implantation dose ratio of F to B (hereinafterreferred to as F/B dose ratio) at a B dose of 1×10¹⁵ cm⁻², is one.

In an active region according to the embodiment that has beenco-implanted with F³⁰ at an acceleration energy of 2.5 keV, the F ionsare diffused to a depth of approximately six nm from the surface of theactive region after activation annealing, as shown in FIG. 12. Theprojected range of the implanted F⁺ is at a depth of approximately eightnm from the surface of the active region. Therefore, it is determinedthat the F ions diffuse on the surface side of the active region byactivation annealing. On the other hand, in the active regionco-implanted with F⁺ at an acceleration energy of 7 keV, a sharp peak ata depth of approximately 22 nm from the surface of the active region canbe observed on the concentration distribution of F after activationannealing, as shown in FIG. 13. The projected range of F ions areapproximately 13 nm, and a broad peak can be observed on theconcentration distribution of F immediately after F⁺ implant. Since thedepth of the amorphous region by Ge PAI is approximately 16 nm, pointdefects caused by B and F co-implantation are generated in the Sicrystal in regions deeper than the amorphous region. Activationannealing may cause implanted F ions to flocculate to generated pointdefects. B ions also form pairs with the point defects and diffusedeeply throughout the Si crystal due to enhanced diffusion.

Sheet resistance Rs of the active region, as shown in FIG. 14, decreaseswith increases in F⁺ acceleration energy. For an F⁺ acceleration energyof one keV and an F/B dose ratio of one, sheet resistance Rs increasesby approximately two % compared to the comparative example without F⁺implant. However, the diffusion depth of active regions co-implantedwith F⁺ acceleration energy of one keV is approximately ten % shallowerthan the comparative example without F⁺ implant, as shown in FIG. 11. Byco-implantation with F⁺ acceleration energy of one keV, resistance mayincrease. However, considering a difference of the diffusion depth,resistance of the active region may decrease with F⁺ acceleration energyof one keV, compared to the comparative example. In this manner, withacceleration energy of 2.5 keV and below for F⁺ co-implanted with B⁺, itis possible to suppress diffusion of B and to form an active region withlow resistance.

As shown in FIG. 15, when the F⁺ acceleration energy is seven keV, theconcentration distribution of B remains virtually unchanged with F/Bdose ratio of one or less. When the F/B dose ratio increases to 1.2, thediffusion depth of B is comparable to the comparative example withoutco-implantation. Sheet resistance Rs decreases in correlation with anincrease in the F/B dose ratio, as shown in FIG. 16. With an F/B doseratio of 1.2, sheet resistance decreases for about 30% compared to thecomparative example.

As shown in FIG. 17, when the F³⁰ acceleration energy is 2.5 keV, thediffusion depth of B is shallow compared with the comparative examplewithout co-implantation. The concentration distribution of B remainsvirtually unchanged with F/B dose ratio of one or less. When the F/Bdose ratio increases to 1.2, the diffusion depth of B is shallower.Sheet resistance Rs decreases in correlation with an increase in the F/Bdose ratio, as shown in FIG. 18. With an F/B dose ratio of 1.2, sheetresistance decreases for about 10% compared to the comparative example.

In this manner, with both of the acceleration energy of 2.5 keV andseven keV, it is possible to suppress diffusion of B and to form anactive region with low resistance by F/B dose ratio greater than one.

In the description put forth above, B³⁰ are used as an ion species of Bwhich is the first impurity. However, it is also acceptable to use borondifluoride (BF₂) as an ion species of the first impurity. In a caseusing BF₂ ⁺, acceleration energy is 1.5 keV to provide a projected rangeto be approximately two nm as with B³⁰ . A dose of BF₂ ⁺ is 1×10¹⁵ cm⁻²,which is the same as with B³⁰ . As shown in FIGS. 19, 20, and 21, Bconcentration distributions of active regions formed by B⁺ and BF₂ ⁺implants without F⁺ implant, with F/B dose ratio of one, and with F/Bdose ratio of 1.2, are consistent within a error range of SIMSmeasurement. Here, the F⁺ acceleration energy is 2.5 keV. Each activeregion by B⁺ implant without F⁺ implant, as show in FIG. 22, with an F/Bdose ratio of 1, and with an F/B dose ratio of 1.2, has a lower sheetresistance Rs compared to each active region by BF₂ ⁺ implant.Specifically, in a case of co-implantation with F as the secondimpurity, it is desirable to use B⁺ rather than BF₂ ⁺ as an ion speciesof the first impurity.

It is also possible to use N as the second impurity. In a case ofco-implantation with N⁺, diffusion depth of B in active regionsincreases due to the increases of N⁺ acceleration energy, as shown inFIG. 23. Further, co-implantation dose ratio of N to B (hereinafterreferred to as N/B dose ratio) at a B dose of 1×10¹⁵ cm⁻² is one. Thediffusion depth of B at N⁺ acceleration energy of four keV is comparableto the comparative example without N³⁰ implant. At acceleration energyof two keV or less, diffusion of B is suppressed. At acceleration energyof six keV or more, diffusion depth of B not only increases, butconcentrations of B in flat regions of B concentration distributionsdecrease.

There is a trend for sheet resistance Rs to increase in correlation withincreases in acceleration energy, at N³⁰ acceleration energy above 2 keVor more, as shown in FIG. 24. Sheet resistances Rs of active regionsformed at acceleration energy of one to two kev are 40% to 50% greatercompared to the comparative example without N⁺ implant. As shown in FIG.23, in the active regions formed with an acceleration energy of 2 keV orless, sheet resistances Rs decrease regardless of decreases in diffusiondepth of B, compared with the active regions formed with accelerationenergy of four keV or more.

As shown in FIG. 25, when N⁺ acceleration energy is six keV, at N/B doseratio of one or more, concentration distributions of B in the activeregions remains virtually unchanged. Even at N/B dose ratio of 0.8,diffusion depth of B of the active region is deep compared with thecomparative example. Sheet resistance Rs of the active region increasesin correlation with increases in N/B dose ratio, as shown in FIG. 26.Thus, no effectiveness may be provided with any N/B dose ratio, in caseof co-implantation with N⁺ at acceleration energy of six keV.

As shown in FIG. 27, when N⁺ acceleration energy is two keV, at N/B doseratio of one or less, diffusion of B of the active region is suppressed.At N/B dose ratios of 0.8 and 1, concentration distributions of B in theactive regions remains virtually unchanged. Sheet resistance Rs of theactive region is lower with N/B dose ratio of 0.8, as shown in FIG. 28.Thus, it is desirable to have N/B dose ratio of less than one in case ofco-implantation with N⁺ at acceleration energy of 2 keV or less.

Further, it is acceptable to co-implant with N⁺, using BF₂ ⁺ as an ionspecies projected of the first impurity. BF₂ ⁺ acceleration energy is1.5 keV to provide a projected range to be approximately two nm, in thesame manner as with B⁺. A dose of BF₂ ⁺ is 1×10¹⁵ cm⁻², which is thesame as with B⁺. The B concentration distributions of active regionsformed by co-implantation of B⁺ or BF₂ ⁺ with N³⁰ are consistent withinan error range of SIMS measurement with respective N/B dose ratio of 0.8and one, as shown in FIGS. 29 and 30. The active regions formed by BF₂ ⁺implant have lower sheet resistances Rs with respective N/B dose ratioof 0.8 and one, compared to the active regions formed by B⁺ implant, asshown in FIG. 31. Specifically, in a case of co-implantation with N asthe second impurity, it is desirable to use BF₂ ⁺ rather than B⁺ as anion species of the first impurity.

Next, a semiconductor device manufacturing method according to theembodiment will be described using a manufacturing process for ap-channel metal-insulator-semiconductor (PMIS) transistor as an example.However, the semiconductor device is not limited to a pMIS transistor.It is acceptable to use an n-channel MIS (nMIS) transistor, acomplementary MIS (CMIS) transistor and the like, as the semiconductordevice. In a case using an nMIS transistor, P is used as the firstimpurity. Also, a silicon oxynitride (SiON) film is described as aninsulating film. However, an insulating film is not limited to an SiONfilm. For instance, it is acceptable to use an SiO₂ film, an Si₃N₄ film,and the like, as an insulating film. It is also acceptable to use acomposite insulating film among an SiO₂ film, an SiON film, an Si₃N₄film, and various metal oxide films.

As shown in FIG. 32, an SiO₂ film is formed at a thickness ofapproximately one nm for instance, on a surface of an n-type Sisemiconductor substrate 10 by rapid thermal oxidation (RTO). Afterward,an insulating film 112 of an SiON film having an effective oxidethickness (EOT) of approximately 1.3 nm is formed by plasma nitridationand the like. Herein, EOT represents the thickness of the film convertedinto an SiO₂ film. As shown in FIG. 33, a conducting film 114 ofpolycrystalline Si (poly-Si) is deposited on the insulating film 112 bychemical vapor deposition (CVD). The conducting film 114 and theinsulating film 112 are processed by photolithography and reactive ionetching (RIE) to delineate a gate electrode 14 and a gate insulatingfilm 12, as shown in FIG. 34.

An SiO₂ film of approximately one to two nm, for example, is formed onan exposed surface of the gate electrode 14 and the semiconductorsubstrate 10 by RTO. An SiO₂ film is then deposited by CVD on the formedSiO₂ film using tetraetoxysilane (TEOS) and the like. The deposited SiO₂film is selectively removed by directional etching such as RIE, formingan offset spacer 32 on side walls of the gate electrode 14 and the gateinsulating film 12, as shown in FIG. 35.

As shown in FIG. 36, halo impurity implanted regions 34 are formed bytilt angle implantation of As ions, using the gate electrode 14 and theoffset spacer 32 as masks. Tilt angle implantation conditions are anacceleration energy of 50 keV, dose of 2.5×10¹³ cm ⁻², and a tilt angleof 30 degrees, for example. The projected range of As is approximately25 to 30 nm from the surface of the semiconductor substrate.

As shown in FIG. 37, amorphous regions 16 are formed at a depth ofapproximately 16 nm from the surface of the semiconductor substrate 10by Ge PAI, using the gate electrode 14 and the offset spacer 32 asmasks. Ion implantation conditions are an acceleration energy of 5 keVand a dose of 1×10¹⁵ cm⁻². The projected range of Ge is approximatelyeight nm from the surface of the semiconductor substrate.

As shown in FIG. 38, first impurity implanted regions 18 are formed onboth sides of the gate insulating film 12 by B³⁰ implantation into theamorphous regions 16 using the gate electrode 14 and the offset spacer32 as masks. Ion implantation conditions are an acceleration energy of0.2 keV and a dose of 1×10¹⁵ cm⁻². The projected range of B isapproximately two nm from the surface of the amorphous region 16.

As shown in FIG. 39, F ions are co-implanted into the first impurityimplanted regions 18 formed in the amorphous regions 16, using the gateelectrode 14 and the offset spacer 32 as masks. Second impurityimplanted regions 20 are formed on both sides of the gate insulatingfilm 12 by F⁺ implant. Ion implantation conditions are an accelerationenergy of 2.5 keV and a dose of 1×10¹⁵ cm⁻². The projected range of F isapproximately eight nm from the surface of the amorphous region 16.

Activation annealing of the implanted B is executed by RTA, atapproximately 800° C. to 900° C. for five seconds. As shown in FIG. 40,the B ions implanted into the first impurity implanted regions 18 areelectrically activated by RTA while diffusing to form p-type extensionregions 22 (first diffusion regions) . Additionally, As ions implantedinto the halo impurity implanted regions 34 shown in FIG. 39, areelectrically activated while diffusing to form n-type halo regions 44.The halo regions 44 contact the extension regions 22, and are formedaround the extension regions 22. Additionally, the amorphous regions 16are re-crystallized by activation annealing. Furthermore, a channelregion is formed between the extension regions 22.

A multi-layered insulating film of an SiO₂ film, an Si₃N₄ film, and aborosilicate glass (BSG), and the like, is deposited in sequence on theextension regions 22 by CVD. CVD temperature is between approximately650° C. to 700° C. The multi-layered insulating film is then selectivelyremoved by directional etching such as RIE, forming a sidewall spacer 46on side walls of the gate insulating film 12 and the gate electrode 14,as shown in FIG. 41. B ions are implanted from the surface of theextension regions 22, using the gate electrode 14 and the sidewallspacer 46 as masks. Ion implantation conditions are an accelerationenergy of four keV and a dose of 3×10¹⁵ cm⁻². Next, activation annealingat approximately 1000° C. to 1080° C. is executed by spike RTA. As aresult, p-type source/drain regions 48 are formed deeper than the haloregions 44 on both sides of the sidewall spacer 46, as shown in FIG 41.The extension regions 22 include second diffusion regions 24 in whichthe F ions are diffused on the surface side of the extension regions 22.

An interlevel insulating film of SiO₂, for example, is deposited on thesurface of the source/drain regions 48 on top of the semiconductorsubstrate 10. Contact holes are then opened in the interlevel insulatingfilm on top of the gate electrode 14 and the source/drain regions 48.Wirings are connected to the gate electrode 14 and the source/drainregions 48 through each of the contact holes. Thus, A semiconductordevice is manufactured.

According to a semiconductor manufacturing method of the embodiment, theamorphous regions 16 are formed by Ge PAI, as shown in FIG. 37. Also,the extension regions 22 are formed by B and F co-implantation into theamorphous regions 16, as shown in FIGS. 38 and 39. As a result,diffusion of B may be suppressed, and it becomes possible to formextension regions having shallow pn junctions with low resistance.

OTHER EMBODIMENTS

In the description of the embodiment of the present invention, a pnjunction is formed inside of the n-type semiconductor substrate 10.However, it is also acceptable to form a pn junction in a well providedin the n-type or p-type semiconductor substrate 10. For example, it isacceptable to form a pn junction by ion implantation of p-typeimpurities such as B, in an n-well formed by ion implantation of n-typeimpurities such as As. It is also acceptable to form a pn junction byion implantation of n-type impurities such as P, in a p-well formed byion implantation of p-type impurities such as B.

In the description of the embodiment, an Si substrate is used as thesemiconductor substrate 10. However, the semiconductor substrate 10 isnot limited to an Si substrate. It is acceptable to use a Si-onInsulator (SOI) substrate. It is also acceptable to use a group IValloyed crystal substrate such as silicon carbide (SiC), silicongermanium (SiGe), silicon germanium carbon (SiGeC) as the semiconductorsubstrate 10.

Various modifications will become possible for those skilled in the artafter storing the teachings of the present disclosure without departingfrom the scope thereof.

1. A manufacturing method for a semiconductor device, comprising:forming an amorphous region in a surface region of a semiconductorsubstrate by implanting one of germanium ions and silicon ions;implanting ions of first impurity atoms into the amorphous region, thefirst impurity atoms contributing to electric conductivity; implantingions of second impurity atoms into the amorphous region, the secondimpurity atoms not contributing to the electric conductivity; andactivating the ions of the first impurity atoms by annealing the surfaceregion of the semiconductor substrate.
 2. The method of claim 1, whereinthe first impurity atoms are boron atoms.
 3. The method of claim 2,wherein the second impurity atoms are fluorine atoms.
 4. The method ofclaim 3, wherein a dose ratio of the first impurity atoms to the secondimpurity atoms is greater than one.
 5. The method of claim 1, whereinthe first impurity atoms are boron difluoride atoms.
 6. The method ofclaim 5, wherein the second impurity atoms are nitrogen atoms.
 7. Themethod of claim 6, wherein a dose ratio of the first impurity atoms tothe second impurity atoms is less than one.
 8. The method of claim 1,wherein a depth of implantation of the ions of the first impurity atomsis more shallow than a depth of the amorphous region.
 9. The method ofclaim 1, wherein a depth of implantation of the ions of the secondimpurity atoms is more shallow than a depth of the amorphous region, anddeeper than a depth of implantation of the ions of the first impurityatoms.
 10. The method of claim 1, wherein the first impurity atoms areactivated by rapid thermal annealing.
 11. The method of claim 1, whereinthe amorphous region is formed by a gate electrode of ametal-insulator-semiconductor fabricated on the semiconductor substrateas a mask.
 12. The method of claim 11, wherein the first impurity atomsare activated so as to form an extension region on both sides of a gateinsulating film provided below the gate electrode.
 13. A manufacturingmethod for a semiconductor device, comprising: forming a gate insulatingfilm on a surface of a semiconductor substrate and a gate electrode onthe gate insulating film; forming an amorphous region on both sides ofthe gate insulating film in a surface region of the semiconductorsubstrate by implanting one of germanium ions and silicon ions; forminga first impurity implanted region by implanting ions of first impurityatoms into the amorphous region, the first impurity atoms contributingto electric conductivity; implanting ions of second impurity atoms intothe amorphous region, the second impurity atoms not contributing to theelectric conductivity; and activating the ions of the first impurityatoms by annealing the surface region of the semiconductor substrate.